Product Change Notice

MOS11 Optimized Metallization on UDR2 0.42UM Technology

Motorola will consider this change approved unless specific conditions of acceptance are provided in writing within 30 days of receipt of this notice. To do so, contact your local Motorola Sales Office.

Issue Date Effective Date Notification #
20-Feb-1998 21-Mar-1998 3448

Affected Change Categories
Affected Product Divisions
Motorola Fab Site
Network Sys
Wireless Infrastructure
Wireless Subscriber-Platform Sys
Storage/Imaging Sys
New Media Sys
Comm, Trans, Access Sys
Additional Reliability Data
Samples
None
Contact Local Sales Office

For any questions concerning this notification:

Contact: Leo Luquette
Phone: (512) 895-6114

Description and Purpose

Motorola is pleased to announce improvements to our MOS11 UDR2 0.42um technology by implementing the metallization processes from our more advanced 0.35um technology. These process enhancements take advantage of already qualified technologies and provides increased manufacturability and standardization throughout the fabrication facility.

The current UDR2 metallization is comprised of 99% Al, 1% Cu in addition to a Titanium, Titanium-Nitride under layer and Titanium-Nitride anti-reflective coating (top layer). The optimized metallization is 99.5% Al, 0.5% Cu with a Titanium, Titanium-Nitride under layer and Titanium, Titanium-Nitride anti-reflective coating. The advanced metallization improves the formation of the interconnections between metal layers, refered to as vias.

This process change notification is also coincident with the anouncement of MC status for the 68EC060 and 68LC060 devices.

Qualification Plan

See reliability data summary section.

Reliability Data Summary

This reliability data is based on process qualification using 5204QV and additional qualification data provided by the 56306.

5204QV H20D MOS11 0.35 micros
Die Dimentions: 131 x 130 mils

LTDY (4.5V/125 degrees C)

  168 Hr 504 Hr 1008 Hr 2016 Hr
Lot 1 0/100 0/100 0/100 0/100
Lot 2 0/100 0/100 0/100 0/100
Lot 3 0/94 0/94 0/100 0/94
Lot 4 0/100 0/100 0/100 0/100
Lot 5 0/100 0/100 0/100 0/100

56306 J27A MOS11 0.42 micros
Die Dimentions: 311 x 281 mils

LTDY (4.5V/125 degrees C)

  168 Hr 504 Hr 1008 Hr
Lot 1 0/80 0/80 0/80
Lot 2 0/80    
Lot 3 0/79    

Changed Part Identification

68EC060 - Device marking changed from XC to MC. Mask ID changed from 2G59Y to 3G59Y.
68LC060 - Device marking changed from XC to MC. Mask ID changed from 2G59Y to 3G59Y.
68060 - 0E41J changed to 1E41J
860 - 2J24A and 3J24A changed to 9J24A
860SR - 1J24A changed to 6J24A
823 - 5F98S changed to 7F98S
850 - 4F98S changed to 6F98S
821 - 5J24A changed to 8J24A
56306 - 5J27A changed to 7J27A
56303 - 4J22A changed to 5J22A
XC390252 - changed from 9J22A to 8J22A

Affected Device List (With Specials):

MC68EC060RC50 MC68EC060RC66 MC68LC060RC50 MC68LC060RC66
SC414265RC50 SC414312RC60 SC414327FE50E SPAK823MZT50Z3
SC414343RC60 SPAK823CZT25Z3 SPAK823MZT25Z3 SPAK823MZT50Z3
SPAK823ZT25 SPAK823ZT25Z3 SPAK823ZT50 SPAK823ZT50Z3
SPAKXC56303GC00 SPAKXC56303GC100 SPAKXC56303GC66 SPAKXC56303GC80
SPAKXC56303PV100 SPAKXC56303PV66 SPAKXC56303PV80 SSP26003PV66
SSP26202GC66 SSP26202GC66R2 SSP26202GC80 SSP26202GC80R2
SSP26202PV66 SSP26202PV80 SSP26204GC66 SSP26204GC80
SSP26204PV66 SSP26204PV80 SSP26300PV66 SSP26301PV
SSP26301PV66 SSP26301PV80 XC303B4GC XC303B4GC100
XC303B4GC66 XC303B4GC80 XC303B4PV XC303B4PV100
XC303B4PV66 XC303B4PV80 XC56303GC XC56303GC00
XC56303GC100 XC56303GC66 XC56303GC80 XC56303PV
XC56303PV100 XC56303PV66 XC56303PV80 XC56304GC66
XC56304GC80 XC56304PV66 XC56304PV80 XC68060RC50
XC68060RC50C XC68060RC60 XC68EC060RC50 XC68EC060RC50E
XC68EC060RC60 XC68EC060RC60E XC68EC060RC66E XC68EC060RC75E
XC68EC060ZU50E XC68EC060ZU66E XC68LC060BRC66E XC68LC060FE50
XC68LC060RC75E XC68LC060ZU50E XC68LC060ZU66E XC68S060RC
XPC823CZT25Z3 XPC823MZT25Z3 XPC823MZT50Z3 XPC823MZTZ3
XPC823ZT XPC823ZT25 XPC823ZT25Z2 XPC823ZT25Z3
XPC823ZT50 XPC823ZT50Z2 XPC823ZT50Z3 XPC823ZTZ2
XPC823ZTZ3 XPC850SEZT25 XPC850SEZT33 XPC850SEZT40
XPC850SEZT50 XPC850ZT25 XPC850ZT33 XPC850ZT40
XPC850ZT50 XPC860DCZP50B XPC860DEZP50B XPC860DHZP50B
XPC860ENZP50B XPC860MHZP50B XPC860MHZP50BR2 XPC860SRCZP33B
XPC860SRCZP50B XPC860SRZP25B XPC860SRZP33B XPC860SRZP40B
XPC860SRZP50B XPC860SRZPB XPC860ZP50B  

Electrical Characteristic Summary

Performance is identical.
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